Lo Presti, Francesca; Pellegrino, Anna L.; Malandrino, Graziella published the artcile< Journey of a molecule from the solid to the gas phase and vice versa: direct estimation of vapor pressure of alkaline-earth metalorganic precursors for atmospheric pressure vapor phase deposition of fluoride films>, HPLC of Formula: 112-63-0, the main research area is vapor pressure evaporation enthalpy atomic layer deposition fluoride film.
Atm. pressure (AP) vapor phase processes such as spatial at. layer deposition (S-ALD) and AP-metalorganic chem. vapor deposition (AP-MOCVD) are becoming increasingly appealing for their use in a variety of academic and industrial applications. Evaluation of precursor vapor pressures is crucial for their application in AP processes and to this aim the Langmuir equation has been applied as a simple and straightforward method for estimating the vapor pressure and vaporization enthalpy of various metalorganic precursors. Using benzoic acid as a calibration reference, the vapor pressure-temperature curves for several alk.-earth 灏?diketonate fluorinated compounds, with mol. formula “”M(hfa)2璺疞”” (with M = Mg, Ca, Sr, Ba; Hhfa = 1,1,1,5,5,5-hexafluoroacetylacetone and L = diglyme, triglyme, and tetraglyme) are derived from their termogravimetric curves. Thus, the enthalpy of vaporization of all complexes has been estimated using the Clausius-Clapeyron equation. As a proof of concept, preliminary results on the use of [Mg(hfa)2璺?H2O]璺?diglyme and [Ca(hfa)2璺痙iglyme璺疕2O] or [Ca(hfa)2璺痶riglyme] as precursors for AP-MOCVD deposition of MgF2 and CaF2 in the form of thin films are presented. This approach may be used to easily determine vapor pressures of complexes and thus evaluate “”a priori”” the suitability of a compound as precursor for AP-MOCVD and/or spatial ALD.
Dalton Transactions published new progress about Atomic layer deposition. 112-63-0 belongs to class esters-buliding-blocks, and the molecular formula is C19H34O2, HPLC of Formula: 112-63-0.
Referemce:
Ester – Wikipedia,
Ester – an overview | ScienceDirect Topics